Freund L.B., Suresh S. Thin Film Materials. Stress, Formation and Surface Evolution

Cambridge University Press. 2004. 820 p.This book provides comprehensive coverage of stress, defect formation and surface evolution in thin films. With its balanced coverage of theory, experiment and simulation and many homework problems, the text will be essential reading in senior undergraduate and graduate courses on thin films.Introduction and Overview
Film stress and substrate curvature
Stress in anisotropic and patterned films
Delamination and fracture
Film buckling, bulging and peeling
Dislocation formation in epitaxial systems
Dislocation interactions and strain relaxation
Equilibrium and stability of surfaces
The role of stress in mass transport