Hicks T.R., Atherton P.D. The Nano Positioning Book: Moving and Measuring to Better than a Nanometre

ISTE Publishing Company, 1997. — 128 p.Because the existing terms used in specifying nano precision mechanisms (accuracy, precision, linearity) are subject to ambiguous international standards, this book defines and clarifies the terms in a full glossary and includes general descriptions of the core technologies involved.