Gatzen H.H., Saile V., Leuthold J. Micro and Nano Fabrication: Tools and Processes

Springer, 2015. — 537 p.For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.Introduction — MEMS, a Historical Perspective
Vacuum Technology
Deposition Technologies
Etching Technologies
Doping and Surface Modification
Lithography
LIGA
Nanofabrication by Self-Assembly
Enabling Technologies I — Wafer Planarization and Bonding
Enabling Technologies II — Contamination Control
Device Fabrication — An Example