Madou M.J. Fundamentals of Microfabrication and Nanotechnology. Volume II: Manufacturing Techniques for Microfabrication and Nanotechnology

3rd Edition. – Taylor & Francis Group, LLC, CRC Press, Boca Raton, FL, USA, 2011. – 658 p. – ISBN13: 978-1-4398-9530-6Manufacturing Techniques for Microfabrication and Nanotechnology consists of three parts and ten chapters.
In Part I, we review different forms of lithography, detailing those that differ most from the miniaturiza-tion processes used to fashion integrated circuits (ICs). In Part II we deal with material removal processes, and additive technologies are the focus of Part III. We review gas and vapor phase dry etching processes, including chemical, physical (purely mechanical), and chemical-physical (mostly chemical with some mechanical assist). In Part III we cover additive (forming) processes, where materials are added, usually in a selective man-ner, to a work piece or a device under construction. Physical vapor deposition processes (PVD) and chemical vapor deposition (CVD).
Note to the Reader: Manufacturing Techniques for Microfabrication and Nanotechnology was originally composed as part of a larger book that has since been broken up into three separate volumes. Manufacturing Techniques for Microfabrication and Nanotechnology represents the second volume in this set. The other two volumes include Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology and From MEMS to Bio-NEMS: Manufacturing Techniques and Applications. Cross-references to these books appear throughout the text and will be referred to as Volume I and Volume III, respectively.Lithography
Photolithography
Next-Generation Lithographies and Lithography Research
Pattern transfer with Subtractive techniques
Dry Etching
Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools
Thermal Energy-Based Removing
MechanicalEnergy-BasedRemoving
Pattern transfer with additive techniques
Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining
Chemical, Photochemical, and Electrochemical Forming Techniques
Thermal Energy-Based Forming Techniques—Thermoforming
Micromolding Techniques—LIGA