Ru C., Liu X., Sun Y. (Eds.). Nanopositioning Technologies Fundamentals and Applications

Springer Cham Heidelberg New York Dordrecht London, 2016, 409 pages. – ISBN: 978-3-319-23852-4, ISBN: 978-3-319-23853-1 (eBook), DOI 10.1007/978-3-319-23853-1.Enriches understanding of the latest fundamentals and applications of nanopositioning technologies.
Maximizes reader insights into design/modeling/control of nanopositioning systems, nanomanipulation under scanning electron microscopes and nanopositioning for semiconductor inspection.
Reviews comprehensively key recent research into nanopositioner design, sensors, actuators, controls and emerging applications.A Review of Stick–Slip Nanopositioning Actuators.
Piezoelectric Motor Technology: A Review.
Mechanical Design of High-Speed Nanopositioning Systems.
Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.
Electro-Magnetic Nano-Positioning.
Modeling of Piezoelectric-Actuated Nanopositioning Stages Involving with the Hysteresis.
Tracking Control for Nanopositioning Systems.
Position Sensors for Nanopositioning.
MEMS Nanopositioners.
Control Issues of MEMS Nanopositioning Devices.
A Review of Nanomanipulation in Scanning Electron Microscopes.
Nanopositioning for Lithography and Data Storage.